Deposisi lapisan tipis nitrida : silikat dengan metode implantasi ion dan analisis sifat-sifat optisnya
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| Main Authors: | , |
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| Format: | Theses and Dissertations NonPeerReviewed |
| Published: |
[Yogyakarta] : Universitas Gadjah Mada
1998
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| Subjects: | |
| Online Access: | https://repository.ugm.ac.id/42947/ http://etd.ugm.ac.id/index.php?mod=penelitian_detail&sub=PenelitianDetail&act=view&typ=html&buku_id=3812 |
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| Institution: | Universitas Gadjah Mada |
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