Pengaruh suhu anil dan dosis ion pada hambatan lapis lapisan semikonduktor silikon diimplantasi ion boron dan fosfor dosis tinggi
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Theses and Dissertations NonPeerReviewed |
| Published: |
[Yogyakarta] : Universitas Gadjah Mada
1995
|
| Subjects: | |
| Online Access: | https://repository.ugm.ac.id/56200/ http://etd.ugm.ac.id/index.php?mod=penelitian_detail&sub=PenelitianDetail&act=view&typ=html&buku_id=17065 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Universitas Gadjah Mada |