Effect of radio frequency power on a-CNx film properties and its performance as humidity sensors
A series of amorphous carbon nitride (a-CNx) thin films were deposited on silicon (111) substrates using a home-built radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) system. The a-CNx thin films were deposited from a mixture of a fixed flow-rate of ethane (C2H6, 20 sccm) and nit...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Penerbit Universiti Kebangsaan Malaysia
2018
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| Online Access: | http://journalarticle.ukm.my/12668/1/29%20Rozidawati%20Awang.pdf http://journalarticle.ukm.my/12668/ http://www.ukm.my/jsm/malay_journals/jilid47bil11_2018/KandunganJilid47Bil11_2018.html |
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| Institution: | Universiti Kebangsaan Malaysia |
| Language: | English |
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