Optical constants and electronic transition in hydrogenated silicon (Si:H) thin films deposited by layer-by-layer (LBL) deposition technique

• Main Authors: Goh, Boon Tong, Muhamad Rasat Muhamad, Saadah Abdul Rahman
• Format: Article
• Language: English
• Published: Universiti Kebangsaan Malaysia 2011
• Online Access: http://journalarticle.ukm.my/2448/1/13_Goh.pdf; http://journalarticle.ukm.my/2448/; http://www.ukm.my/jsm/
• Institution: Universiti Kebangsaan Malaysia

Optical constants derived from optical transmission (T) and reflectance (R) spectra in the wavelength range of 220 to 2200 nm are presented in this paper for hydrogenated silicon (Si:H) thin films deposited by plasma enhanced chemical vapor deposition (PECVD) using the layer-by-layer (LBL) depositio...