Characterizations of cupric oxide thin films on glass and silicon substrates by radio frequency magnetron sputtering

• Main Authors: P.K., Ooi, C.G., Ching, M.A., Ahmad, S.S., Ng, M.J., Abdullah, H., Abu Hassan, Z., Hassan
• Format: Article
• Language: English
• Published: Universiti Kebangsaan Malaysia 2014
• Online Access: http://journalarticle.ukm.my/7057/1/16_P.K._Ooi.pdf; http://journalarticle.ukm.my/7057/; http://www.ukm.my/jsm/
• Institution: Universiti Kebangsaan Malaysia

Cupric oxide (CuO) thin films were prepared on a glass and silicon (Si) substrates by radio frequency magnetron sputtering system. The structural, optical and electrical properties of CuO films were characterized by X-ray diffraction (XRD), atomic force microscopy (AFM), Fourier transform infrared s...