ELECTROMAGNETIC BASED CMOS-MEMS ENERGY HARVESTING SYSTEM

• Main Author: ABDUL RAHMAN, ZATI HANANI
• Format: Final Year Project
• Language: English
• Published: Universiti Teknologi PETRONAS 2011
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://utpedia.utp.edu.my/10445/1/2011%20-%20Electromagnetic%20Based%20CMOS-MEMS%20Energy%20Harvesting%20System.pdf; http://utpedia.utp.edu.my/10445/
• Institution: Universiti Teknologi Petronas

An Electromagnetic Based CMOS-MEMS Energy Harvesting System can convert kinetic energy which comes from vibration into electrical power. Energy harvesting technique is very promising because no changing batteries or setting cable and wires. Kinetic energy present in various form such as vibrations, random displacements also force can be harvested into electrical energy by using electromagnetic mechanisms. Electromagnetic is suitable since it is more precise, energy efficient, extremely powerful and easier to maintain. Power is generated by means of electromagnetic transduction between a moving coil construct on a CMOS-MEMS structure and a static magnet placed between it. It mainly consists of a proof mass, thin film, coil and also a permanent magnet. Simulation shows that the line width and the turns of coil influence the efficiency of the induced voltage. Acceleration also play important role because higher acceleration give higher frequency and result in increasing the change of magnetic flux rate in the coil and yield in higher output voltage according to Faraday's Law. The mechanical characteristics are being simulated by using engineering software, CoventorWare. The sensitivity of the structure achieved from the simulation is 7.938xlo·6 V/g at 1.5 Tesla.