INVESTIGATION INTO A MEMS BASED 3-AXIS MAGNETIC SENSOR UTILIZING LORENTZ FORCE

This thesis presents a study on a Micro Electro Mechanical Systems (MEMS) based 3-axis magnetic sensor for applications requiring low magnetic field detection (1 T – 100 mT). Simultaneous measurements of 3-axis magnetic fields are required for compass applications.

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Bibliographic Details
Main Author: MIAN, MUHAMMAD UMER
Format: Thesis
Language:English
Published: 2018
Subjects:
Online Access:http://utpedia.utp.edu.my/19018/1/G02066-2018-final-thesis.pdf
http://utpedia.utp.edu.my/19018/
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Institution: Universiti Teknologi Petronas
Language: English
Description
Summary:This thesis presents a study on a Micro Electro Mechanical Systems (MEMS) based 3-axis magnetic sensor for applications requiring low magnetic field detection (1 T – 100 mT). Simultaneous measurements of 3-axis magnetic fields are required for compass applications.