INVESTIGATION INTO A MEMS BASED 3-AXIS MAGNETIC SENSOR UTILIZING LORENTZ FORCE
This thesis presents a study on a Micro Electro Mechanical Systems (MEMS) based 3-axis magnetic sensor for applications requiring low magnetic field detection (1 T – 100 mT). Simultaneous measurements of 3-axis magnetic fields are required for compass applications.
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Format: | Thesis |
Language: | English |
Published: |
2018
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Online Access: | http://utpedia.utp.edu.my/19018/1/G02066-2018-final-thesis.pdf http://utpedia.utp.edu.my/19018/ |
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Institution: | Universiti Teknologi Petronas |
Language: | English |
Summary: | This thesis presents a study on a Micro Electro Mechanical Systems (MEMS) based 3-axis magnetic sensor for applications requiring low magnetic field detection (1 T – 100 mT). Simultaneous measurements of 3-axis magnetic fields are required for compass applications. |
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