Characterization of a MEMS-Based Humidity Sensor

Humidity sensors are very essential in many industrial processes and household appliances. They enable system operators and control mangers to fully monitor their processes in the industry. However, these sensors are miniaturized to be in micro-scale units due the development of micromachining te...

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Bibliographic Details
Main Author: AMIN ALI, AHMED ABDELAZIZ
Format: Final Year Project
Language:English
Published: Universiti Teknologi PETRONAS 2017
Subjects:
Online Access:http://utpedia.utp.edu.my/22984/1/Dissertation-Ahmed-17713.pdf
http://utpedia.utp.edu.my/22984/
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Institution: Universiti Teknologi Petronas
Language: English