Simulation and analysis of piezoresistive microcantilever

• Main Authors: Johari, Shazlina, Lim, Catherine Ee Chen, Taib, Bibi Nadia, Ismail, Mohd Hafiz, Ibrahim, Siti Noorjannah
• Format: Article
• Language: English; English
• Published: Penerbit UniMAP 2023
• Subjects: TK452 Electric apparatus and materials. Electric circuits. Electric networks; TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices; TK7885 Computer engineering
• Online Access: http://irep.iium.edu.my/109814/2/109814_Simulation%20and%20analysis%20of%20piezoresistive%20microcantilever.pdf; http://irep.iium.edu.my/109814/8/109814_Simulation%20and%20analysis%20of%20piezoresistive%20microcantilever_SCOPUS.pdf; http://irep.iium.edu.my/109814/; https://ejournal.unimap.edu.my/index.php/ijneam/article/view/389/263; https://ejournal.unimap.edu.my/index.php/ijneam/article/view/389
• Institution: Universiti Islam Antarabangsa Malaysia

Currently, most piezoresistive microcantilever sensors are configured with a dual-layer design that includes a piezoresistor integrated onto the upper surface of a microcantilever. The dual-layer design effectively enhances sensitivity and the piezoresistance effect. However, integrating the piezore...