Fabrication and characterization of sub polymeric microring resonators for biosensors

• Main Authors: Mohd Salleh, Mohd Hazimin, Cooper, Jonathan M, Glidle, Andrew
• Format: Conference or Workshop Item
• Language: English
• Published: 2009
• Subjects: Q Science (General); QC Physics
• Online Access: http://irep.iium.edu.my/12513/1/Full_paper_PGBiomed09_MHSkpt.pdf; http://irep.iium.edu.my/12513/
• Institution: Universiti Islam Antarabangsa Malaysia

In this paper, SU8 polymer was used to fabricate a waveguide and microring resonator for optical biosensing applications in biological (aqueous) media (e.g. to measure protein or DNA interactions). Fabrication steps and results obtained by using UV photolithography at 2μm gap and electron beam litho...