Investigation of finish cut of microelectrodischarge milling for nanosurface finish

In this article, the machining conditions to achieve nanometric surface roughness in finish cut microelectrodischarge milling were investigated. For a constant gap voltage, the effect of feed rate and capacitance was studied on average surface roughness (Ra) and maximum peak-to-valley roughness heig...

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Main Authors: Ali, Mohammad Yeakub, Mehfuz, R.
Format: Article
Language:English
Published: A V S AMER INST PHYSICS, USA 2009
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Online Access:http://irep.iium.edu.my/14898/4/JVST_B__2009_27%283%29_1330-1334.pdf
http://irep.iium.edu.my/14898/
http://dx.doi.org/10.1116/1.3079701
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Institution: Universiti Islam Antarabangsa Malaysia
Language: English
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spelling my.iium.irep.148982012-03-22T01:11:58Z http://irep.iium.edu.my/14898/ Investigation of finish cut of microelectrodischarge milling for nanosurface finish Ali, Mohammad Yeakub Mehfuz, R. QC Physics TA Engineering (General). Civil engineering (General) TK Electrical engineering. Electronics Nuclear engineering In this article, the machining conditions to achieve nanometric surface roughness in finish cut microelectrodischarge milling were investigated. For a constant gap voltage, the effect of feed rate and capacitance was studied on average surface roughness (Ra) and maximum peak-to-valley roughness height (Ry). Statistical models were developed using a three-level, two-factor experimental design. The developed models minimized Ra and Ry by desirability function approach. Maximum desirability was found to be more than 98%. The minimum values of Ra and Ry were 23 and 173 nm, respectively, for 1.00 μm s−1 feed rate and 0.01 nF capacitance. Verification experiments were conducted to check the accuracy of the models, where the responses were found to be very close to the predicted values. Thus, the developed models can be used to generate nanometric level surface finish, which are useful for many applications in microelectromechanical systems. A V S AMER INST PHYSICS, USA 2009-05 Article REM application/pdf en http://irep.iium.edu.my/14898/4/JVST_B__2009_27%283%29_1330-1334.pdf Ali, Mohammad Yeakub and Mehfuz, R. (2009) Investigation of finish cut of microelectrodischarge milling for nanosurface finish. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 27 (3). pp. 1330-1334. ISSN 1071-1023 http://dx.doi.org/10.1116/1.3079701 doi:10.1116/1.3079701
institution Universiti Islam Antarabangsa Malaysia
building IIUM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider International Islamic University Malaysia
content_source IIUM Repository (IREP)
url_provider http://irep.iium.edu.my/
language English
topic QC Physics
TA Engineering (General). Civil engineering (General)
TK Electrical engineering. Electronics Nuclear engineering
spellingShingle QC Physics
TA Engineering (General). Civil engineering (General)
TK Electrical engineering. Electronics Nuclear engineering
Ali, Mohammad Yeakub
Mehfuz, R.
Investigation of finish cut of microelectrodischarge milling for nanosurface finish
description In this article, the machining conditions to achieve nanometric surface roughness in finish cut microelectrodischarge milling were investigated. For a constant gap voltage, the effect of feed rate and capacitance was studied on average surface roughness (Ra) and maximum peak-to-valley roughness height (Ry). Statistical models were developed using a three-level, two-factor experimental design. The developed models minimized Ra and Ry by desirability function approach. Maximum desirability was found to be more than 98%. The minimum values of Ra and Ry were 23 and 173 nm, respectively, for 1.00 μm s−1 feed rate and 0.01 nF capacitance. Verification experiments were conducted to check the accuracy of the models, where the responses were found to be very close to the predicted values. Thus, the developed models can be used to generate nanometric level surface finish, which are useful for many applications in microelectromechanical systems.
format Article
author Ali, Mohammad Yeakub
Mehfuz, R.
author_facet Ali, Mohammad Yeakub
Mehfuz, R.
author_sort Ali, Mohammad Yeakub
title Investigation of finish cut of microelectrodischarge milling for nanosurface finish
title_short Investigation of finish cut of microelectrodischarge milling for nanosurface finish
title_full Investigation of finish cut of microelectrodischarge milling for nanosurface finish
title_fullStr Investigation of finish cut of microelectrodischarge milling for nanosurface finish
title_full_unstemmed Investigation of finish cut of microelectrodischarge milling for nanosurface finish
title_sort investigation of finish cut of microelectrodischarge milling for nanosurface finish
publisher A V S AMER INST PHYSICS, USA
publishDate 2009
url http://irep.iium.edu.my/14898/4/JVST_B__2009_27%283%29_1330-1334.pdf
http://irep.iium.edu.my/14898/
http://dx.doi.org/10.1116/1.3079701
_version_ 1643606951751319552