Design and modelling of an impedance-based MEMS biosensor

• Main Authors: Jamil, Nadira, Nordin, Anis Nurashikin, Voiculescu, Ioana
• 格式: Conference or Workshop Item
• 語言: English
• 出版: 2011
• 主題: TK7885 Computer engineering
• 在線閱讀: http://irep.iium.edu.my/15123/1/06088352.pdf; http://irep.iium.edu.my/15123/; http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=6086117
• 機構: Universiti Islam Antarabangsa Malaysia

This paper present the preliminary design of a micro-electromechanical system (MEMS) surface acoustic wave (SAW) resonator as a biosensor using COMSOL. The biosensor consists of a SAW resonator which utilizes mechanical acoustic waves as its sensing mechanism. The preliminary study was performed to...