Simulation of MEMs piezoelectric energy harvester

• Main Authors: Md Ralib, Aliza Aini, Nordin, Anis Nurashikin, Salleh, Hanim
• Format: Conference or Workshop Item
• Language: English
• Published: 2010
• Subjects: TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
• Online Access: http://irep.iium.edu.my/15698/1/Simulation_of_a_MEMs_piezoelectric_energy_harvester.pdf; http://irep.iium.edu.my/15698/; http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5486470
• Institution: Universiti Islam Antarabangsa Malaysia

The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare© to obtain the device at resonance frequency, output voltage and optimum dimensions.