MEMS biosensor with integrated impedance and mass-sensing capabilities
A biosensor device (1) providing an analysis platform for detecting cell growth, comprising of an aluminium nitride (AlN) base (2), a shear horizontal-surface acoustic wave (SH-SAW) resonator including an input transducer (4) and an output transducer (5) symmetrically positioned on the aluminum nitr...
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| Main Authors: | , , , |
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| 格式: | Patent |
| 語言: | English |
| 出版: |
2011
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| 主題: | |
| 在線閱讀: | http://irep.iium.edu.my/1922/3/US7964144.pdf http://irep.iium.edu.my/1922/ http://ip.com/patent/US7964144 |
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| 機構: | Universiti Islam Antarabangsa Malaysia |
| 語言: | English |