Influences of additives on copper film quality and gap filling capability of plating process
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2011
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Online Access: | http://irep.iium.edu.my/19353/1/chp6.pdf http://irep.iium.edu.my/19353/ http://rms.research.iium.edu.my/bookstore/default.aspx |
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my.iium.irep.193532012-09-05T00:19:04Z http://irep.iium.edu.my/19353/ Influences of additives on copper film quality and gap filling capability of plating process Mridha, Shahjahan Law, Shao Beng TJ Mechanical engineering and machinery IIUM Press 2011 Book Chapter REM application/pdf en http://irep.iium.edu.my/19353/1/chp6.pdf Mridha, Shahjahan and Law, Shao Beng (2011) Influences of additives on copper film quality and gap filling capability of plating process. In: Contemporary metallic materials. IIUM Press, Kuala Lumpur, pp. 34-40. ISBN 9789674181642 http://rms.research.iium.edu.my/bookstore/default.aspx |
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International Islamic University Malaysia |
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English |
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TJ Mechanical engineering and machinery |
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TJ Mechanical engineering and machinery Mridha, Shahjahan Law, Shao Beng Influences of additives on copper film quality and gap filling capability of plating process |
format |
Book Chapter |
author |
Mridha, Shahjahan Law, Shao Beng |
author_facet |
Mridha, Shahjahan Law, Shao Beng |
author_sort |
Mridha, Shahjahan |
title |
Influences of additives on copper film quality and gap filling capability of plating process |
title_short |
Influences of additives on copper film quality and gap filling capability of plating process |
title_full |
Influences of additives on copper film quality and gap filling capability of plating process |
title_fullStr |
Influences of additives on copper film quality and gap filling capability of plating process |
title_full_unstemmed |
Influences of additives on copper film quality and gap filling capability of plating process |
title_sort |
influences of additives on copper film quality and gap filling capability of plating process |
publisher |
IIUM Press |
publishDate |
2011 |
url |
http://irep.iium.edu.my/19353/1/chp6.pdf http://irep.iium.edu.my/19353/ http://rms.research.iium.edu.my/bookstore/default.aspx |
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1643607651965206528 |