Micro-hotplate based temperature stabilization system for CMOS SAW resonators
Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents two methods of temperature control for CMOS SAW resonators using embedded polysilicon h...
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Springer Berlin / Heidelberg
2009
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/1939/2/Microsystems2009.pdf http://irep.iium.edu.my/1939/ http://www.springerlink.com/content/cv523534175363p2/about/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Universiti Islam Antarabangsa Malaysia |
| Language: | English |