Fabrication of aluminium doped zinc oxide piezoelectric thin film on a silicon substrate for piezoelectric MEMS energy harvesters

• Main Authors: Md Ralib @ Md Raghib, Aliza 'Aini, Nordin, Anis Nurashikin, Salleh, Hanim, Othman, Raihan
• Format: Article
• Language: English
• Published: Springer Berlin / Heidelberg 2012
• Subjects: TP155 Chemical engineering
• Online Access: http://irep.iium.edu.my/25085/1/25085.pdf; http://irep.iium.edu.my/25085/; http://link.springer.com/article/10.1007/s00542-012-1550-9
• Institution: Universiti Islam Antarabangsa Malaysia

Thin film piezoelectric materials play an essential role in micro electro mechanical system (MEMS)energy harvesting due to its low power requirement and high available energy densities. Non-ferroelectric piezoelectric materials such as ZnO and AlN are highly silicon compatible making it suitable for...