Hysteresis compensation for piezoelectric tube scanner in atomic force microscopy

• Main Authors: Othman, Yahya Sheriff, Mahmood, Iskandar Al-Thani, Alang Md Rashid, Nahrul Khair
• Format: Conference or Workshop Item
• Language: English
• Published: 2012
• Subjects: Q Science (General); TJ212 Control engineering
• Online Access: http://irep.iium.edu.my/25831/1/Hysteresis_Compensation_for_Piezoelectric_Tube_Scanner_in_Atomic_Force.pdf; http://irep.iium.edu.my/25831/; http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6149633&tag=1
• Institution: Universiti Islam Antarabangsa Malaysia

In this paper, a radial basis function neural network (RBFNN) is designed and used for such purpose. The network is used in conjunction with a self-tuning PID controller. The differential equation of Jenkine element is adopted for hysteresis modeling. The simulation results show that the proposed co...