Geometrical integrity of micromold cavity sputtered by FIB using multilayer slicing approach
This paper discusses the investigation of geometrical integrity of micromold cavity produced by focused ion beam (FIB) sputtering slice by slice. Parabolic shaped micromold cavity was chosen as an example. Preliminary experiments were carried out to characterize the machine and select the optim...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Springer Berlin / Heidelberg
2007
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27097/1/016_MST_13%281%29_2007_103-107.pdf http://irep.iium.edu.my/27097/ http://link.springer.com/article/10.1007/s00542-006-0254-4 |
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| Institution: | Universiti Islam Antarabangsa Malaysia |
| Language: | English |
| Summary: | This paper discusses the investigation of
geometrical integrity of micromold cavity produced
by focused ion beam (FIB) sputtering slice by slice.
Parabolic shaped micromold cavity was chosen as an
example. Preliminary experiments were carried out
to characterize the machine and select the optimum
process parameters such as beam current, pixel
spacing, aperture size, and dwell time. The geometrical
integrity of the sputtered micromold cavity was
analyzed based on three selected criteria such as
aspect ratio, cross-sectional area, and area offset. The
theoretical and sputtered profiles were compared.
The investigation showed that the measured aspect
ratio was almost equal to the theoretical aspect ratio
for low aspect ratio microcavity. For high aspect
ratio cavity, the measured aspect ratio was
higher than the theoretical aspect ratio by 5–8%. The
area offset was found to be 5–10% of the theoretical
area. The variation in theoretical and sputtered
cross-sectional area was 2–4%. The characterization
showed that the geometrical integrity of micromold
cavity sputtered by FIB using slicing approach was
high. |
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