Surface roughness of sputtered silicon. II. Model verification
Experimental verification of the mathematical surface roughness model for sputtered silicon was performed. The beam shape and its significant level of intensity were determined first by measuring the topography of craters sputtered by focused ion beam (FIB). Then the beam function was generated for...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor and Francis Inc.
2001
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27112/1/024_MaMP_2001_16%283%29_315-329.pdf http://irep.iium.edu.my/27112/ http://www.tandfonline.com/doi/full/10.1081/AMP-100107376#.Ue4xGdJHIrU |
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| Institution: | Universiti Islam Antarabangsa Malaysia |
| Language: | English |