Producing LIGA-competitive microcomponents
This paper presents a new technique to investigate deep microfeatures, and an alternative process to produce microcomponents. Micro-EDM and focused ion beam micromachining were combined to directly fabricate the mold features. The first process was to remove the bulk material while the later was to...
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| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2000
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27137/1/036_SPIE_USA_2000_4147_49-57_Wayne.pdf http://irep.iium.edu.my/27137/ |
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| Institution: | Universiti Islam Antarabangsa Malaysia |
| Language: | English |