Fabrication of micromold cavity for microreplication: A review

• Main Authors: Ali, Mohammad Yeakub, Khan, Ahsan Ali, Mehfuz, R., Aishah, S., Hayati, N., Hajar, N.
• Format: Conference or Workshop Item
• Language: English
• Published: 2008
• Subjects: TS Manufactures
• Online Access: http://irep.iium.edu.my/27157/1/048_ICME_2008_JB_MFG_ID-0127.pdf; http://irep.iium.edu.my/27157/
• Institution: Universiti Islam Antarabangsa Malaysia

In this paper, various fabrication techniques for micromold cavity are reviewed and discussed. Silicon and lithography based fabrication were being used for years for the fabrication of micromold cavity. In the later stage direct fabrication techniques such as focused ion beam, micro electro disc...