Focused ion beam micromachining of mems
This paper discussed focused ion beam micro nano machining to fabricate MEMS (microelectromechanical systems) such as optical elements, trimming of atomic force microscope (AFM) tip, nanopillar, micromilling tool, microcavity for replication is discussed. The trimmed AFM tip was tested in measure...
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| Main Author: | |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2008
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27164/1/052_ISAME_CUS_SKorea_2008_8-16.pdf http://irep.iium.edu.my/27164/ |
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| Institution: | Universiti Islam Antarabangsa Malaysia |
| Language: | English |