Sputtering of paraboloid microstructure using fib

• Main Authors: Ali, Mohammad Yeakub, Loo, Y. W.
• Format: Conference or Workshop Item
• Language: English
• Published: 2006
• Subjects: TJ Mechanical engineering and machinery; TS Manufactures
• Online Access: http://irep.iium.edu.my/27177/1/058_ICMN_2006_13-16.pdf; http://irep.iium.edu.my/27177/
• Institution: Universiti Islam Antarabangsa Malaysia

This paper describes the fabrication of three dimensional (3D) microstructures using focused ion beam (FIB) sputtering. Paraboloid cavity was chosen as an example for 3D microstructure. This microstructure was considered as the combination of a series of flat circular slices. The successive slices w...