Development of micro end milling process for fabricating MEMS

The influences of selected micro end milling cutting parameters on surface roughness were studied on beryllium copper alloy and PMMA (poly-methyl-methacrylate). A number of microchannels were fabricated in order to characterize the process parameters influencing surface roughness. Two-level four-fac...

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Main Author: Ali, Mohammad Yeakub
Format: Monograph
Language:English
Published: International Islamic University Malaysia 2009
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Online Access:http://irep.iium.edu.my/28922/1/096_IFRG0701-06_2009_Full_Report.pdf
http://irep.iium.edu.my/28922/
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Institution: Universiti Islam Antarabangsa Malaysia
Language: English
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spelling my.iium.irep.289222014-03-17T02:38:31Z http://irep.iium.edu.my/28922/ Development of micro end milling process for fabricating MEMS Ali, Mohammad Yeakub TJ Mechanical engineering and machinery TS Manufactures The influences of selected micro end milling cutting parameters on surface roughness were studied on beryllium copper alloy and PMMA (poly-methyl-methacrylate). A number of microchannels were fabricated in order to characterize the process parameters influencing surface roughness. Two-level four-factor statistical models were developed to predict the average (Ra) and peak-to-valley (Rt) surface roughness for beryllium copper alloy. Relationship of cutting speed and feed rate on surface roughness of PMMA were plotted and analyzed. Experiments were conducted with four process parameters: feed rate, depth of cut, cutting speed and tool diameter. The interaction effect of parameters was studied. Both Ra and Rt were found strongly influenced by feed per tooth, depth of cut and tool diameter. An average surface roughness of 0.30 μm for beryllium copper and 3.46 μm was observed. Furthermore, the burr height formed during machining is in the range of 15-55 μm. Burr height formation of machined microchannel was increasing proportionally with respect to cutting speeds and feed per tooth. Therefore, of low cutting speed and feed per tooth is used in microchannel fabrication to minimize the burr height. International Islamic University Malaysia 2009 Monograph REM application/pdf en http://irep.iium.edu.my/28922/1/096_IFRG0701-06_2009_Full_Report.pdf Ali, Mohammad Yeakub (2009) Development of micro end milling process for fabricating MEMS. Research Report. International Islamic University Malaysia, Kuala Lumpur. (Unpublished) FRG 0701 - 06
institution Universiti Islam Antarabangsa Malaysia
building IIUM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider International Islamic University Malaysia
content_source IIUM Repository (IREP)
url_provider http://irep.iium.edu.my/
language English
topic TJ Mechanical engineering and machinery
TS Manufactures
spellingShingle TJ Mechanical engineering and machinery
TS Manufactures
Ali, Mohammad Yeakub
Development of micro end milling process for fabricating MEMS
description The influences of selected micro end milling cutting parameters on surface roughness were studied on beryllium copper alloy and PMMA (poly-methyl-methacrylate). A number of microchannels were fabricated in order to characterize the process parameters influencing surface roughness. Two-level four-factor statistical models were developed to predict the average (Ra) and peak-to-valley (Rt) surface roughness for beryllium copper alloy. Relationship of cutting speed and feed rate on surface roughness of PMMA were plotted and analyzed. Experiments were conducted with four process parameters: feed rate, depth of cut, cutting speed and tool diameter. The interaction effect of parameters was studied. Both Ra and Rt were found strongly influenced by feed per tooth, depth of cut and tool diameter. An average surface roughness of 0.30 μm for beryllium copper and 3.46 μm was observed. Furthermore, the burr height formed during machining is in the range of 15-55 μm. Burr height formation of machined microchannel was increasing proportionally with respect to cutting speeds and feed per tooth. Therefore, of low cutting speed and feed per tooth is used in microchannel fabrication to minimize the burr height.
format Monograph
author Ali, Mohammad Yeakub
author_facet Ali, Mohammad Yeakub
author_sort Ali, Mohammad Yeakub
title Development of micro end milling process for fabricating MEMS
title_short Development of micro end milling process for fabricating MEMS
title_full Development of micro end milling process for fabricating MEMS
title_fullStr Development of micro end milling process for fabricating MEMS
title_full_unstemmed Development of micro end milling process for fabricating MEMS
title_sort development of micro end milling process for fabricating mems
publisher International Islamic University Malaysia
publishDate 2009
url http://irep.iium.edu.my/28922/1/096_IFRG0701-06_2009_Full_Report.pdf
http://irep.iium.edu.my/28922/
_version_ 1643609575835828224