Simulation of a MEMS piezoelectric energy harvester

• Main Authors: Md Ralib @ Md Raghib, Aliza 'Aini, Nordin, Anis Nurashikin, Salleh, Hanim
• Format: Conference or Workshop Item
• Language: English
• Published: 2010
• Subjects: TK7885 Computer engineering
• Online Access: http://irep.iium.edu.my/3707/1/3707.pdf; http://irep.iium.edu.my/3707/; http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5486470&tag=1
• Institution: Universiti Islam Antarabangsa Malaysia

The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare #x00A9; to obtain the device at resonance frequency, output voltage and optimum dimensions.