Simulations of surface and bulk acoustic wave MEMS biosensors
Traditionally a telecommunication device, the emerging application of acoustic wave devices as sensors is rapidly gaining attention due to its high sensitivities. In this work, a comparative study of surface (SAW) and bulk (BAW) acoustic wave biosensors is presented. The MEMS SAW resonator is formed...
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| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2010
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/3711/1/11.pdf http://irep.iium.edu.my/3711/ http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5486462&tag=1 |
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| Institution: | Universiti Islam Antarabangsa Malaysia |
| Language: | English |