Novel MEMS fully differential capacitive transducer design and analysis

• Main Authors: Ya, Ma Li, Khan, Sheroz, Nordin, Anis Nurashikin, Al-Khateeb, Khalid A. Saeed, Islam, Md. Rafiqul, Naji, Ahmed Wathik
• Format: Conference or Workshop Item
• Language: English
• Published: 2011
• Subjects: TK7885 Computer engineering
• Online Access: http://irep.iium.edu.my/3731/1/28.pdf; http://irep.iium.edu.my/3731/; http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5937152&tag=1
• Institution: Universiti Islam Antarabangsa Malaysia

This paper details the design and analysis of a novel MEMS fully differential capacitive sensor which can be used to measure the parameter related to force changes, such as pressure or acceleration. This MEMS model uses a new structure to get extremely high resolution of 11.6fF/KPa. Further it has a good level of linearity as regard changes in capacitance as a function of force change.