Dependence of preferred c-axis orientation on RF magnetron sputtering power for AZO/Si acoustic wave devices
We report the deposition of high quality c-axis oriented Aluminium doped Zinc Oxide (AZO) on silicon substrate for surface acoustic wave (SAW) applications. AZO thin film is prepared by Radio frequency magnetron sputtering method. Sputtering is a preferred method because it is able to perform deposi...
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Main Authors: | , , , |
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Format: | Conference or Workshop Item |
Language: | English English |
Published: |
2015
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Subjects: | |
Online Access: | http://irep.iium.edu.my/45282/1/45282.pdf http://irep.iium.edu.my/45282/4/45282_Dependence%20of%20preferred%20c-axis%20orientation_Scopus.pdf http://irep.iium.edu.my/45282/ http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=7160990 |
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Institution: | Universiti Islam Antarabangsa Malaysia |
Language: | English English |