Design and analysis of a low-voltage electrostatic actuated RF CMOS-MEMS switch

• Main Authors: Ma, Li Ya, Nordin, Anis Nurashikin, Soin, Norhayati
• Format: Conference or Workshop Item
• Language: English
• Published: 2013
• Subjects: TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
• Online Access: http://irep.iium.edu.my/46633/1/C_-_2013_-_Design_and_Analysis_of_a_Low-Voltage_Electrostatic_Actuated_RF_CMOS-MEMS_Switch.pdf; http://irep.iium.edu.my/46633/; http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6706468
• Institution: Universiti Islam Antarabangsa Malaysia

This paper presents the design and analysis of a radio frequency (RF) micro-electromechanical system (MEMS) switch with low actuation voltage using MIMOS 0.35μm complementary metal oxide semiconductor (CMOS) process. The advantage of this RF MEMS switch is very low actuation voltage design which is...