Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator

• Main Authors: Md Ralib @ Md Raghib, Aliza 'Aini, Nordin, Anis Nurashikin
• Format: Conference or Workshop Item
• Language: English; English
• Published: IEEE 2016
• Subjects: TK7885 Computer engineering
• Online Access: http://irep.iium.edu.my/54613/9/54613_Investigation%20of%20Acoustic%20Wavelength%20Effects.pdf; http://irep.iium.edu.my/54613/8/54613_Investigation%20of%20Acoustic%20Wavelength%20Effects_Scopus.pdf; http://irep.iium.edu.my/54613/; http://ieeexplore.ieee.org/abstract/document/7808371/
• Institution: Universiti Islam Antarabangsa Malaysia

This paper addresses the investigation of acoustic wavelength effects on silicon compatible SAW resonator based on Al doped ZnO thin film. Three different resonators at acoustic wavelength of 3.2, 3.6 and 4.8 m were simulated using COMSOL Multiphysics. The device is fabricated using post CMOS ap...