Design and Simulation of MEMS Hemholtz Resonator for Acoustic Energy Harvester

• Main Authors: Ab Rahim, Rosminazuin, Johari, Muhammad Jabrullah
• Format: Conference or Workshop Item
• Language: English
• Published: IEEE 2016
• Subjects: T Technology (General); TA Engineering (General). Civil engineering (General)
• Online Access: http://irep.iium.edu.my/55745/1/IEEE%20Published%20Jabrullah%20ICCCE2016.pdf; http://irep.iium.edu.my/55745/; http://ieeexplore.ieee.org
• Institution: Universiti Islam Antarabangsa Malaysia

An acoustic energy harvester using Helmholtz resonator with piezoelectric circular diaphragm has been studied using COMSOL Multiphysics 5.1. In this paper, multiple designs considerations for MEMS Helmholtz resonator and piezoelectric circular diaphragm including the length and radius of the tube, t...