Recent nanofabrication of silicon dioxide on silicon wafer using AFM operated at low temperature
Field-induced oxidation has become a promising process that is capable of directly producing high-resolution surface oxide patterns on variety materials. This report initiated the idea of the possibility of a controlled nanofabrication of SiO2 on silicon wafer by utilizing a frozen humid air film. A...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Trans Tech Publications Ltd., Switzerland
2011
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/8577/1/AGUS_-_Applied_Mechanics_and_Materials_2011_-_Nanofabrication.pdf http://irep.iium.edu.my/8577/ http://www.scientific.net/AMM.84-85.317 |
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| Institution: | Universiti Islam Antarabangsa Malaysia |
| Language: | English |