The study and optimization of titanium dioxide (TiOz) nano structures by RF magnetron sputtering / Nur Amierah Mohd Asib
Radio Frequency (RF) magnetron sputtering is one of the method to produce Titanium dioxide (TiOa) nanostructures. Where, mixture of argon and oxygen gas are used as the main sputtering to strike the solid target material which is pure Ti02, to eject the atoms in the target material for deposition of...
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| Main Author: | |
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| Format: | Student Project |
| Language: | English |
| Published: |
2012
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| Subjects: | |
| Online Access: | http://ir.uitm.edu.my/id/eprint/43954/1/43954.pdf http://ir.uitm.edu.my/id/eprint/43954/ |
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| Institution: | Universiti Teknologi Mara |
| Language: | English |