Structural study of porous Si with different crystal orientation fabricated using two-step alternating current photo-electrochemical etching technique / Fatimah Zulkifli … [et al.]

• Main Authors: Zulkifli, Fatimah, Radzali, Rosfariza, Abd Rahim, Alhan Farhanah, Mahmood, Ainorkhilah, Abu Bakar, Aslina
• Format: Article
• Language: English
• Published: Universiti Teknologi MARA 2021
• Subjects: Elementary particle physics; Inorganic chemistry; Materials of engineering and construction
• Online Access: https://ir.uitm.edu.my/id/eprint/52085/1/52085.pdf; https://ir.uitm.edu.my/id/eprint/52085/; https://jeesr.uitm.edu.my/
• Institution: Universiti Teknologi Mara

Two different crystal orientation of n-type Si substrates n(100) and n(111) were used to fabricate porous structure using two-step Alternating Current Photo- Electrochemical (ACPEC) etching technique. This research aims to investigate the difference of porous structure and properties for different o...