Design simulation and finite element analysis of piezoresistive microcantilever for human stress measurement / Nina Korlina Madzhi ...[et al.]
This work focuses on the design and finite element analysis of a polysilicon-based piezoresistive microcantilever beam for application in human stress measurement. In principle, adsorption of saliva amylase on a functionalized surface of the microfabricated cantilever induces surface stress and cons...
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Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
UiTM Press
2009
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Subjects: | |
Online Access: | https://ir.uitm.edu.my/id/eprint/61859/1/61859.pdf https://ir.uitm.edu.my/id/eprint/61859/ https://jeesr.uitm.edu.my/v1/ |
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Institution: | Universiti Teknologi Mara |
Language: | English |