Development of MgZnO thin films for 1 GHz monolithic microwave integrated circuit applications / Rafidah Ahmad

• Main Author: Ahmad, Rafidah
• Format: Thesis
• Language: English
• Published: 2011
• Subjects: Dielectrics; Microwaves. Including microwave circuits
• Online Access: https://ir.uitm.edu.my/id/eprint/65253/1/65253.pdf; https://ir.uitm.edu.my/id/eprint/65253/
• Institution: Universiti Teknologi Mara

The aims of this research are to prepare magnesium zinc oxide (MgZnO) thin films and to study their physical as well as electrical properties at DC and high frequencies. Current MgZnO thin film deposition methods are incompatible with MMIC processing and costly. Furthermore, existing dielectric film...