An Energy Star Physical Vapor Deposition (PVD) Machine

Physical Vapor Deposition (PVD) Technique is one of the most favourable techniques to deposit thin films in the range of Nano scale. However, the current PVD setup in the market has several deficiencies. The normal size of the PVD is relatively large and this will require larger parts and devices to...

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Main Authors: Bushroa, Abdul Razak, Azmi, N.A., Mahmoodian, Reza, Abd Shukor, Mohd Hamdi, Gupta, V., Wasa, K.
Format: Conference or Workshop Item
Language:English
Published: 2016
Subjects:
Online Access:http://eprints.um.edu.my/16558/1/Paper_4_I-ECO-015-AR_Bushroa-UM.pdf
http://eprints.um.edu.my/16558/
https://drive.google.com/file/d/0ByBlFVsjNeg5aHZiZ09HVTlQNXc/view?usp=sharing
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Institution: Universiti Malaya
Language: English
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spelling my.um.eprints.165582021-10-01T04:00:36Z http://eprints.um.edu.my/16558/ An Energy Star Physical Vapor Deposition (PVD) Machine Bushroa, Abdul Razak Azmi, N.A. Mahmoodian, Reza Abd Shukor, Mohd Hamdi Gupta, V. Wasa, K. QC Physics TJ Mechanical engineering and machinery TS Manufactures Physical Vapor Deposition (PVD) Technique is one of the most favourable techniques to deposit thin films in the range of Nano scale. However, the current PVD setup in the market has several deficiencies. The normal size of the PVD is relatively large and this will require larger parts and devices to build the system that contributes to a larger space to locate the equipment. The target used (i.e. The source of the atom to be deposited as a thin film) in the conventional method is normally in the solid form. Target of ceramic, a combination of more than one element, inorganic or powders could not be sputtered using the conventional method due to the unsupportive design of PVD. The conventional PVD for lab-scale usage could be improved by the innovative design of magnetron sputtering that utilizes the concentration of electrons to enhance the plasma ionization. The design highlights the arrangement of magnets to capture and entrap electrons for better ionization rate. This knowledge is transferred to ULVAC (M) Sdn Bhd to be embedded into the conventional lab-scale PVD to enable the sputter of powders. Since sputtering the powder and its mixture is relatively easier and efficient in this PVD system, the technology will enhance innovative and creative formulation of various thin film depositions for different properties. This innovative technology is seen to address issues of industrial related community to find new ideas for improved properties of thin film and its application and to reduce costs. 2016-05 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.um.edu.my/16558/1/Paper_4_I-ECO-015-AR_Bushroa-UM.pdf Bushroa, Abdul Razak and Azmi, N.A. and Mahmoodian, Reza and Abd Shukor, Mohd Hamdi and Gupta, V. and Wasa, K. (2016) An Energy Star Physical Vapor Deposition (PVD) Machine. In: International Conference on Knowledge Transfer, 1-3 December 2015, Putrajaya, Malaysia. https://drive.google.com/file/d/0ByBlFVsjNeg5aHZiZ09HVTlQNXc/view?usp=sharing
institution Universiti Malaya
building UM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaya
content_source UM Research Repository
url_provider http://eprints.um.edu.my/
language English
topic QC Physics
TJ Mechanical engineering and machinery
TS Manufactures
spellingShingle QC Physics
TJ Mechanical engineering and machinery
TS Manufactures
Bushroa, Abdul Razak
Azmi, N.A.
Mahmoodian, Reza
Abd Shukor, Mohd Hamdi
Gupta, V.
Wasa, K.
An Energy Star Physical Vapor Deposition (PVD) Machine
description Physical Vapor Deposition (PVD) Technique is one of the most favourable techniques to deposit thin films in the range of Nano scale. However, the current PVD setup in the market has several deficiencies. The normal size of the PVD is relatively large and this will require larger parts and devices to build the system that contributes to a larger space to locate the equipment. The target used (i.e. The source of the atom to be deposited as a thin film) in the conventional method is normally in the solid form. Target of ceramic, a combination of more than one element, inorganic or powders could not be sputtered using the conventional method due to the unsupportive design of PVD. The conventional PVD for lab-scale usage could be improved by the innovative design of magnetron sputtering that utilizes the concentration of electrons to enhance the plasma ionization. The design highlights the arrangement of magnets to capture and entrap electrons for better ionization rate. This knowledge is transferred to ULVAC (M) Sdn Bhd to be embedded into the conventional lab-scale PVD to enable the sputter of powders. Since sputtering the powder and its mixture is relatively easier and efficient in this PVD system, the technology will enhance innovative and creative formulation of various thin film depositions for different properties. This innovative technology is seen to address issues of industrial related community to find new ideas for improved properties of thin film and its application and to reduce costs.
format Conference or Workshop Item
author Bushroa, Abdul Razak
Azmi, N.A.
Mahmoodian, Reza
Abd Shukor, Mohd Hamdi
Gupta, V.
Wasa, K.
author_facet Bushroa, Abdul Razak
Azmi, N.A.
Mahmoodian, Reza
Abd Shukor, Mohd Hamdi
Gupta, V.
Wasa, K.
author_sort Bushroa, Abdul Razak
title An Energy Star Physical Vapor Deposition (PVD) Machine
title_short An Energy Star Physical Vapor Deposition (PVD) Machine
title_full An Energy Star Physical Vapor Deposition (PVD) Machine
title_fullStr An Energy Star Physical Vapor Deposition (PVD) Machine
title_full_unstemmed An Energy Star Physical Vapor Deposition (PVD) Machine
title_sort energy star physical vapor deposition (pvd) machine
publishDate 2016
url http://eprints.um.edu.my/16558/1/Paper_4_I-ECO-015-AR_Bushroa-UM.pdf
http://eprints.um.edu.my/16558/
https://drive.google.com/file/d/0ByBlFVsjNeg5aHZiZ09HVTlQNXc/view?usp=sharing
_version_ 1713200124304293888