High figure of merit of the post-annealed Ti/Al/ITO transparent conductive contacts sputter deposited on n-GaN

• Main Authors: Ali, A.H., Hassan, Z., Shuhaimi, A.
• Format: Article
• Published: Elsevier 2016
• Subjects: Q Science (General); QC Physics
• Online Access: http://eprints.um.edu.my/18219/; https://doi.org/10.1016/j.jallcom.2016.04.123
• Institution: Universiti Malaya

This paper reports on the enhanced electrical and optical characteristics of Ti/Al/ITO transparent conductive contacts (TCC) deposited on n-GaN for light emitting device applications. Ti/Al thin metal layer was inserted under the top ITO transparent conductive oxides (TCO) in order to improve the el...