Physical and electrical properties of molybdenum thin films grown by DC magnetron sputtering for photovoltaic application

• Main Authors: Rashid, Haroon, Rahman, Kazi Sajedur, Hossain, Mohammad Istiaque, Nasser, Ammar Ahmed, Alharbi, Fahhad H., Akhtaruzzaman, Md., Amin, Nowshad
• Format: Article
• Published: Elsevier 2019
• Subjects: QC Physics; TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.um.edu.my/23677/; https://doi.org/10.1016/j.rinp.2019.102515
• Institution: Universiti Malaya

DC magnetron sputtering was utilized to grow thin layers of molybdenum (Mo) on top of soda lime glass substrates. Deposition power was varied for suitable characteristics of films grown at various DC powers, i.e. 100 W, 150 W and 200 W. Thin Mo film of approximately 580 nm thickness was successfully...