Diminishing the Induced Strain and Oxygen Incorporation on Aluminium Nitride Films Deposited Using Pulsed Atomic-Layer Epitaxy Techniques at Standard Pressure MOCVD
A pulsed atomic-layer epitaxy growth technique has been introduced to substantially diminish the induced strain and oxygen incorporation on aluminium nitride films grown at standard pressure by metal organic chemical vapour deposition. The qualities of the as-deposited aluminium nitride films were s...
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Main Authors: | , , , , , , , |
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Format: | Article |
Published: |
Springer
2021
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Subjects: | |
Online Access: | http://eprints.um.edu.my/25973/ https://doi.org/10.1007/s11664-021-08768-0 |
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Institution: | Universiti Malaya |