Analytical modeling of AIN-based film bulk acoustic wave resonator for hydrogen sulfide gas detection based on PiezoMUMPs

• Main Authors: Ba Hashwan, Saeed S., Md. Khir, Mohd Haris, Al-Douri, Yarub, Ahmed, Abdelaziz Yousif, Algamili, Abdullah Saleh, Alabsi, ‪Sami Sultan, Junaid, Mohammed M.
• Format: Conference or Workshop Item
• Published: 2021
• Subjects: QC Physics; TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.um.edu.my/35456/; https://www.scopus.com/inward/record.uri?eid=2-s2.0-85111984504&doi=10.1088%2f1742-6596%2f1962%2f1%2f012003&partnerID=40&md5=53c383caf866f19dfaab5aec1ac35b6e
• Institution: Universiti Malaya

Aluminium nitride (AIN) thin film bulk acoustic resonator (FBAR) sensor for hydrogen sulfide gas detection has been designed and mathematically modelled using CoventorWare and MATLAB software, respectively. The designed FBAR sensor is based on the PiezoMUMPs fabrication technology. The detection pri...