Crystal quality and surface structure tuning of semi-polar (11-22) GaN on m-plane sapphire via in-situ multiple ammonia treatment

• Main Authors: Anuar, Afiq, Makinudin, Abdullah Haaziq Ahmad, Al-Zuhairi, Omar, Abu Bakar, Ahmad Shuhaimi, Supangat, Azzuliani
• Format: Article
• Published: Elsevier 2020
• Subjects: QC Physics
• Online Access: http://eprints.um.edu.my/36830/
• Institution: Universiti Malaya

The crystal quality and morphological properties of semi-polar (11-22) gallium GaN were enhanced by introducing the In-Situ Multiple Ammonia Treatment (I-SMAT) method. On- and off-axis x-ray rocking curve (XRC) analysis reveals that I-SMAT would reduce several types of crystal defect namely prismati...