Thermal stability of electrodeposited LIGA Ni-W alloys for high temperature MEMS applications

• Main Authors: Haj-Taieb, M., Haseeb, A.S. Md. Abdul, Caulfield, J., Bade, Klaus, Aktaa, J., Hemker, K.J.
• Format: Article
• Published: Springer Verlag (Germany) 2008
• Subjects: TA Engineering (General). Civil engineering (General)
• Online Access: http://eprints.um.edu.my/5758/; https://doi.org/10.1007/s00542-007-0536-5
• Institution: Universiti Malaya

For thermally stable LIGA materials for high temperature MEMS applications LIGA Ni-W layers and micro testing samples with different compositions (15 and 5 at W) were electrodeposited. In order to investigate the thermal stability the Ni-W layers were annealed at different temperatures (300-700 degr...