Design of a low voltage 0.18 um CMOS Surface Acoustic Wave gas sensor
A Surface Acoustic Wave (SAW) gas sensor is designed and tested in this paper. The objective of the designed SAW Gas sensor is to detect H2S and NOX gases. The inter-digital transducers (IDT) antennas in the proposed sensor are coated with thin film WO3, which mass is sensitive to mentioned gas conc...
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| Main Authors: | , |
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| Format: | Article |
| Published: |
IFSA
2011
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| Subjects: | |
| Online Access: | http://eprints.um.edu.my/9715/ |
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| Institution: | Universiti Malaya |