Trap-assisted tunneling mechanism of Zirconium Oxynitride (ZrON) thin film on Silicon Carbide / Nicklaane Krishnamoorthy
This research is a study on the possibilities of trap-assisted tunneling conduction mechanism in Zirconium Oxynitride (ZrON) after Zirconium (Zr) with thickness 5nm was sputtered on Silicon Carbide (SiC) substrate which then underwent simultaneous nitridation and oxidation in Nitrous Oxide (N2O) for...
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| Format: | Thesis |
| Published: |
2020
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| Online Access: | http://studentsrepo.um.edu.my/12126/1/Nicklaane_Krishnamoorthy.jpg http://studentsrepo.um.edu.my/12126/8/nick.pdf http://studentsrepo.um.edu.my/12126/ |
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| Institution: | Universiti Malaya |
