Experimental and numerical studies on a metallic pulsed capillary discharge as an Extreme Ultra-Violet (EUV) Source / Chan Li San

• 主要作者: Chan , Li San
• 格式: Thesis
• 出版: 2016
• 主題: Q Science (General); QC Physics
• 在線閱讀: http://studentsrepo.um.edu.my/12536/1/Chan_Li_San.pdf; http://studentsrepo.um.edu.my/12536/2/Chan_Li_San.pdf; http://studentsrepo.um.edu.my/12536/

A system for the generation of metallic capillary discharge plasma has been developed and studied. The quartz capillary is initially evacuated to a low pressure of 10-5 mbar. The transient hollow cathode discharge (THCD) generated high energy electron beam is employed to initiate the discharge by va...