Layer-by-layer plasma enhanced chemical vapour deposition of nanocrystalline silicon thin films / Goh Boon Tong

• Main Author: Goh, Boon Tong
• Format: Thesis
• Published: 2012
• Subjects: QC Physics
• Online Access: http://studentsrepo.um.edu.my/3875/1/Title_page%2C_abstract%2C_content.pdf; http://studentsrepo.um.edu.my/3875/2/1_Introduction_%26_2_Literature_Review.pdf; http://studentsrepo.um.edu.my/3875/3/3_Experimental_And_Analytical_Techniques.pdf; http://studentsrepo.um.edu.my/3875/4/4_Plasma_enhanced_chemical_vapour.pdf; http://studentsrepo.um.edu.my/3875/5/5_Light_Emitting_Nanocrystalline_Silicon.pdf; http://studentsrepo.um.edu.my/3875/6/6_Conclusions_and_Suggestions.pdf; http://studentsrepo.um.edu.my/3875/7/REFERENCES.pdf; http://www.pendeta.um.edu.my/uhtbin/cgisirsi/x/0/0/57/5/3?searchdata1=853620{CKEY}&searchfield1=GENERAL^SUBJECT^GENERAL^^&user_id=WEBSERVER; http://studentsrepo.um.edu.my/3875/
• Institution: Universiti Malaya

This work is focused on the study of hydrogenated silicon (Si:H) thin films and nanostructures grown by layer-by-layer (LBL) deposition technique using a home-built radio-frequency (rf) plasma enhanced chemical vapour deposition (PECVD) system. The initial phase of this work involved preparation...