Synthesis of stilbenes for potential application as photoacid generators in polymer film modification / Lee Jia Yin
Photo-acid generators (PAGs) are significant components for photolithography, required for polymer thin film modification in the semiconductor industry. Upon UV irradiation through a photomask, a PAG is photolysed liberating a photoacid that catalytically reacts with a photoresist polymeric matri...
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Format: | Thesis |
Published: |
2015
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Subjects: | |
Online Access: | http://studentsrepo.um.edu.my/6468/1/Final_Submission_M.Tech_2015%2C_Lee_Jia_Yin%2C_SGG_120001.pdf http://studentsrepo.um.edu.my/6468/ |
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Institution: | Universiti Malaya |
Summary: | Photo-acid generators (PAGs) are significant components for photolithography,
required for polymer thin film modification in the semiconductor industry. Upon UV
irradiation through a photomask, a PAG is photolysed liberating a photoacid that
catalytically reacts with a photoresist polymeric matrix either by hydrolysing the
polymer or by cross linking the monomers that later affects the solubility of the
photoresist in an alkaline developer. Stilbenes with suitable ortho-substituents are
known to undergo photocyclisation upon UV irradiation with subsequent
dehydrogenation yielding phenanthrene and an acid. A series of halogenated and
tosylated ortho-substituted stilbenes were synthesized by employing the Wittig reaction
of ortho-substituted aryl aldehydes with benzyl triphenylphosphonium ylide, or, via the
modified Perkin-Aldol reaction of ortho-substituted aryl aldehydes with phenyl acetic
acid. The selected halogens (Br, Cl) and tosyloxy group (OTs) are good leaving groups
thus enhancing the photolysis reaction that liberates Bronsted acids. The afforded
compounds via modified Perkin Reaction were then esterified to obtain the α-substituted
methyl ester stilbenes that predominantly gave E-isomers. The synthesized compounds
were purified by various chromatographic methods (thin layer chromatography, column
chromatography, centrifugal thin layer chromatography and Sephadex LH-20), and
characterized by 1H NMR, 13C NMR and HR-DART-MS. Thus the structures of the
synthesized stilbenes were firmly established. It was observed that the yields obtained
when employing the Wittig reaction ranges from 30-50 %, while the yields obtained
using the modified Perkin-Aldol reaction was generally lower, from 20-40 %. |
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