Aluminium interdigitated electrode with 5.0 μm gap for electrolytic scooting

The goal of the research project is to design, fabricate, and characterize an extremely sensitive biosensor for use in healthcare. Using AutoCAD software, a novel IDE pattern with a 5 µm finger gap was created. Conventional photolithography and regular CMOS technology were used in the fabrication pr...

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Bibliographic Details
Main Authors: M. N. Afnan Udaa, Uda Hashima, M. N. A. Uda, Tijjani Adamd, Asral Bahari Jambekd, Ismail Saad, N. A. Parmin, Shahidah Arina Shamsuddin, N. A Karime, G. Yashnif, Nur Hulwani Ibrahim, N. Parimona, M. F. H. Rani
Format: Article
Language:English
English
Published: Penerbit UniMAP 2023
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Online Access:https://eprints.ums.edu.my/id/eprint/41359/1/ABSTRACT.pdf
https://eprints.ums.edu.my/id/eprint/41359/2/FULL%20TEXT.pdf
https://eprints.ums.edu.my/id/eprint/41359/
https://doi.org/10.58915/ijneam.v17iJune.863
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Institution: Universiti Malaysia Sabah
Language: English
English